Nonuniformities in Magnetic Characteristics of Thin Films Produced by Magnetron Sputtering : научное издание

Описание

Тип публикации: статья из журнала

Год издания: 2026

Идентификатор DOI: 10.1134/S1063776126700093

Ключевые слова: thin magnetic film, uniaxial magnetic anisotropy, effective saturation magnetization, scanning ferromagnetic resonance spectrometer

Аннотация: A Halbach magnetic system has been developed that generates a uniform field in the plane of thin magnetic films (TMFs) produced using magnetron sputtering technology. The magnetic field of the system is approximately 60 times stronger than the gradient field of the magnetron over an area of 60 × 48 mm2. This significantly reduces the nonuniformity of the TMF magnetic characteristic distribution over the sample area. The system is constructed using four magnetic bars, each composed of eight cobalt–samarium magnets measuring 10 × 10 × 10 mm. The reduction in nonuniformity of the magnetic characteristic distribution over the TMF area has been confirmed by measurements using a scanning ferromagnetic resonance spectrometer on 12 samples, each ~55 nm thick, obtained by simultaneous sputtering a Ni80Fe20 target onto 12 × 12 × 0.5 mm quartz glass substrates.

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Издание

Журнал: Journal of Experimental and Theoretical Physics

Выпуск журнала: Т. 142, № 5

Номера страниц: 689-698

ISSN журнала: 10637761

Место издания: Moscow

Издатель: Pleiades Publishing, Ltd.

Персоны

  • Belyaev B.A. (Kirensky Institute of Physics, National Research Center “Krasnoyarsk Scientific Center,” Siberian Branch, Russian Academy of Sciences)
  • Boev N.M. (Kirensky Institute of Physics, National Research Center “Krasnoyarsk Scientific Center,” Siberian Branch, Russian Academy of Sciences)
  • Izotov A.V. (Kirensky Institute of Physics, National Research Center “Krasnoyarsk Scientific Center,” Siberian Branch, Russian Academy of Sciences)
  • Skomorokhov G.V. (Kirensky Institute of Physics, National Research Center “Krasnoyarsk Scientific Center,” Siberian Branch, Russian Academy of Sciences)
  • Solovyev P.N. (Kirensky Institute of Physics, National Research Center “Krasnoyarsk Scientific Center,” Siberian Branch, Russian Academy of Sciences)

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