Тип публикации: статья из журнала

Год издания: 2010

Идентификатор DOI: 10.1088/1742-6596/248/1/012012

Аннотация: The influence of thermal and geometrical properties of a substrate on the structure of carbon films synthesized by the high temperature methods was studied theoretically and experimentally. It-is shown that the carbon films deposited on various substrates had the identical morphology of structure at equality of the temperature condПоказать полностьюuctivity-thickness ratio in condition of identical the other technological parameters of growth films. © 2010 IOP Publishing Ltd.

Журнал: Journal of Physics: Conference Series

Выпуск журнала: Т. 248

Номера страниц: 012012

ISSN журнала: 17426588

Место издания: Bristol

Издатель: IOP Publishing

• Kosakovskii G. G. (Moscow Institute of Electronic Technology)
• Simunin M. M. (Moscow Institute of Electronic Technology)
• Nevolin V. K. (Moscow Institute of Electronic Technology)
• Kosakovskaya Z. Y. A. (Institute Radioenginering and Electronics,RAS)
• Smolovich A. M. (Institute Radioenginering and Electronics,RAS)

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